Deposition of BaxSr1-xTiO3 thin films by double RF hollow cathode plasma jet system | Charles Explorer

Deposition of BaxSr1-xTiO3 thin films by double RF hollow cathode plasma jet system

Publication at Faculty of Mathematics and Physics |

2008

Abstract

Deposition of BaxSr1-xTiO3 thin films by double RF hollow cathode plasma jet system

Keywords

Deposition BaxSr1-xTiO3 films double hollow cathode plasma system

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