Deposition of Ba(x)Sr(1-x)TiO3 thin Films by Double RF Hollow Cathode Plasma Jet System | Charles Explorer

Deposition of Ba(x)Sr(1-x)TiO3 thin Films by Double RF Hollow Cathode Plasma Jet System

Publication at Faculty of Mathematics and Physics |

2008

Abstract

Deposition of Ba(x)Sr(1-x)TiO3 thin Films by Double RF Hollow Cathode Plasma Jet System

Keywords

Deposition Films Double Hollow Cathode Plasma System

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