Emissive Probe Diagnostics in Low Temperature Plasma Effect of Space Charge and Variations of Electron Saturation Current

Abstract

Emissive Probe Diagnostics in Low Temperature Plasma Effect of Space Charge and Variations of Electron Saturation Current

Keywords

• Emissive
• Probe
• Diagnostics
• Temperature
• Plasma
• Effect
• Space
• Charge
• Variations
• Electron
• Saturation
• Current