Study of Plasma-Solid Interaction in Electronegative Gas Mixtures: Influence of Substrate Geometry (Art. No. 00145)

Abstract

Study of Plasma-Solid Interaction in Electronegative Gas Mixtures: Influence of Substrate Geometry

Keywords

• Study
• Plasma-Solid
• Interaction
• Electronegative
• Mixtures
• Influence
• Substrate
• Geometry
• 00145