In situ investigations of Si and Ge interdiffusion in Ge-rich Si/SiGe multilayers using x-ray scattering | Charles Explorer

In situ investigations of Si and Ge interdiffusion in Ge-rich Si/SiGe multilayers using x-ray scattering

Publication at Faculty of Mathematics and Physics |

2007

Abstract

In situ investigations of Si and Ge interdiffusion in Ge-rich Si/SiGe multilayers using x-ray scattering

Keywords

investigations interdiffusion Ge-rich Si/SiGe multilayers using x-ray scattering

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