Measurements of plasma parameters during BaXSr1-xTiO3 thin films deposition by double hollow cathode plasma jet system

Abstract

Measurements of plasma parameters during BaXSr1-xTiO3 thin films deposition by double hollow cathode plasma jet system

Keywords

• Measurements
• plasma
• parameters
• during
• BaXSr1-xTiO3
• films
• deposition
• double
• hollow
• cathode
• plasma
• system