Measurements of the Plasma Parameters in RF Torch Discharge Used for Deposition of Oxide Thin Films | Charles Explorer

Measurements of the Plasma Parameters in RF Torch Discharge Used for Deposition of Oxide Thin Films

Publication at Faculty of Mathematics and Physics |

2006

Abstract

Measurements of the Plasma Parameters in RF Torch Discharge Used for Deposition of Oxide Thin Films

Keywords

Measurements Plasma Parameters Torch Discharge Deposition Oxide Films

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