Time-resolved probe diagnistics of pulsed dc magnetron discharge during deposition of TiOx layers | Charles Explorer

Time-resolved probe diagnistics of pulsed dc magnetron discharge during deposition of TiOx layers

Publication at Faculty of Mathematics and Physics |

2006

Abstract

Time-resolved probe diagnistics of pulsed dc magnetron discharge during deposition of TiOx layers

Keywords

Time-resolved probe diagnistics pulsed magnetron discharge during deposition layers

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