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Time-resolved probe diagnistics of pulsed dc magnetron discharge during deposition of TiOx layers
Publication at Faculty of Mathematics and Physics
|
2006
3 people
Abstract
Time-resolved probe diagnistics of pulsed dc magnetron discharge during deposition of TiOx layers
Keywords
Time-resolved
probe
diagnistics
pulsed
magnetron
discharge
during
deposition
layers
People
person
prof. RNDr. Milan Tichý DrSc.
Faculty of Mathematics and Physics
person
doc. RNDr. Vítězslav Straňák Ph.D.
Faculty of Mathematics and Physics
person
doc. PaedDr. Petr Adámek Ph.D.
Faculty of Mathematics and Physics