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053107
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Specular spectroscopic ellipsometry for the critical dimension monitoring of gratings fabricated on a thick transparent plate (Article No. 053107)
2005 |
Faculty of Mathematics and Physics
publication
Specular spectroscopic ellipsometry for the critical dimension monitoring of gratings fabricated on a thick transparent plate (Article No. 053107)
2005 |
Faculty of Mathematics and Physics, Central Library of Charles University